Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Application of an inverse Mack model for negative tone development simulation
Publication:
Application of an inverse Mack model for negative tone development simulation
Copy permalink
Date
2011
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
22479.pdf
832.37 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gao, Weimin
;
Klostermann, Ulrich
;
Mülders, Thomas
;
Schmoeller, Thomas
;
Demmerle, Wolfgang
;
De Bisschop, Peter
;
Bekaert, Joost
Journal
Abstract
Description
Metrics
Views
1956
since deposited on 2021-10-19
2
last month
1
last week
Acq. date: 2025-12-11
Citations
Metrics
Views
1956
since deposited on 2021-10-19
2
last month
1
last week
Acq. date: 2025-12-11
Citations