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Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis
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Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Arstila, Kai
;
Hantschel, Thomas
;
Franquet, Alexis
;
Vandervorst, Wilfried
;
Vecchio, Emma
;
Bauer, Frank
;
Burgess, Simon
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1978
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Acq. date: 2025-12-17
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Views
1978
since deposited on 2021-10-17
1
last month
1
last week
Acq. date: 2025-12-17
Citations