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Influence of activation annealing and silicidation process on dopant redistribution and pile-up at the NixSiy/SiO2 interface
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1914 since deposited on 2021-10-16
Acq. date: 2026-04-07
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Statistics
Views
1914 since deposited on 2021-10-16
Acq. date: 2026-04-07
Citations