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Influence of activation annealing and silicidation process on dopant redistribution and pile-up at the NixSiy/SiO2 interface
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1909 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
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Views
1909 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations