Publication:
Understanding the kinetics of Metal Induced Lateral Crystallization process to enhance the poly-Si channel quality and current conduction in 3-D NAND memory
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1826 since deposited on 2022-07-09
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Acq. date: 2025-12-15
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1826 since deposited on 2022-07-09
1last month
1last week
Acq. date: 2025-12-15
Citations