Publication:

Stress hybridization for multigate devices fabricated on supercritical strained-SOI (SC-SSOI)

Date

2007
Journal article
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dc.contributor.authorCollaert, Nadine
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorLeys, Frederik
dc.contributor.authorCayrefourcq, I.
dc.contributor.authorGhyselen, Bruno
dc.contributor.authorLoo, Roger
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-16T15:22:13Z
dc.date.available2021-10-16T15:22:13Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11895
dc.source.beginpage646
dc.source.endpage648
dc.source.issue7
dc.source.journalIEEE Electron Device Letters
dc.source.volume28
dc.title

Stress hybridization for multigate devices fabricated on supercritical strained-SOI (SC-SSOI)

dc.typeJournal article
dspace.entity.typePublication
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