Publication:
Sputtering yield: Si and SiGe under O2-bombardment
Date
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T13:06:46Z | |
| dc.date.available | 2021-10-14T13:06:46Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4453 | |
| dc.source.conference | SIMS-Europe | |
| dc.source.conferencedate | 18/09/2000 | |
| dc.source.conferencelocation | Münster Germany | |
| dc.title | Sputtering yield: Si and SiGe under O2-bombardment | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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