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Correlation between Cu microstructure and TSV Cu pumping
Publication:
Correlation between Cu microstructure and TSV Cu pumping
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Date
2014
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Messemaeker, Joke
;
Varela Pedreira, Olalla
;
Philipsen, Harold
;
Beyne, Eric
;
De Wolf, Ingrid
;
Van der Donck, Tom
;
Croes, Kristof
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2284
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations
Metrics
Views
2284
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations