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CMOS compatible anodization process for low cost high density capacitors
Publication:
CMOS compatible anodization process for low cost high density capacitors
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Date
2010
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Detalle, Mikael
;
Rakowski, Michal
;
Potoms, Goedele
;
Mercha, Abdelkarim
;
de Potter de ten Broeck, Muriel
;
Phommahaxay, Alain
;
Sabuncuoglu Tezcan, Deniz
;
Soussan, Philippe
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Views
1891
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-15
Citations