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A holistic approach of SIMS analysis for advanced semiconductor structures
Publication:
A holistic approach of SIMS analysis for advanced semiconductor structures
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Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franquet, Alexis
;
Spampinato, Valentina
;
Pirkl, Alexander
;
Kayser, Sven
;
Moellers, Rudolf
;
Conard, Thierry
;
Vandervorst, Wilfried
;
van der Heide, Paul
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1955
since deposited on 2021-10-27
2
last month
Acq. date: 2025-12-11
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Views
1955
since deposited on 2021-10-27
2
last month
Acq. date: 2025-12-11
Citations