Publication:

A holistic approach of SIMS analysis for advanced semiconductor structures

Date

2019
Proceedings Paper
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dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorPirkl, Alexander
dc.contributor.authorKayser, Sven
dc.contributor.authorMoellers, Rudolf
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.accessioned2021-10-27T09:21:25Z
dc.date.available2021-10-27T09:21:25Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32986
dc.source.conferenceSIMS 22 - 22nd International Conference on Secondary Ion Mass Spectrometry
dc.source.conferencedate20/10/2019
dc.source.conferencelocationKyoto Japan
dc.title

A holistic approach of SIMS analysis for advanced semiconductor structures

dc.typeProceedings paper
dspace.entity.typePublication
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