Publication:

Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

Date

2004

Journal article

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Author(s)

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Lindsay, Richard

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Richard, Olivier

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Clarysse, Trudo

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Vandervorst, Wilfried

Journal

Journal of Vacuum Science and Technology B

Statistics

1906 since deposited on 2021-10-15

Acq. date: 2026-09-10