Publication:
Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth
Date
| dc.contributor.author | Pawlak, Bartek | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Surdeanu, Radu | |
| dc.contributor.author | Dieu, Bjorn | |
| dc.contributor.author | Geenen, Luc | |
| dc.contributor.author | Hoflijk, Ilse | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Duffy, Ray | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Pawlak, Bartek | |
| dc.contributor.imecauthor | Hoflijk, Ilse | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.date.accessioned | 2021-10-15T15:22:30Z | |
| dc.date.available | 2021-10-15T15:22:30Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9410 | |
| dc.source.beginpage | 297 | |
| dc.source.endpage | 301 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 22 | |
| dc.title | Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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