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Electrical characterization of high-dielectric-constant/SiO2 metal-oxide-semiconductor gate stacks by a conductive atomic force microscope
Publication:
Electrical characterization of high-dielectric-constant/SiO2 metal-oxide-semiconductor gate stacks by a conductive atomic force microscope
Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Blasco, X.
;
Porti, M.
;
Nafria, M.
;
Petry, Jasmine
;
Vandervorst, Wilfried
Journal
Nanotechnology
Abstract
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1884
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1884
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations