Publication:

Electrical characterization of high-dielectric-constant/SiO2 metal-oxide-semiconductor gate stacks by a conductive atomic force microscope

Date

 
dc.contributor.authorBlasco, X.
dc.contributor.authorPorti, M.
dc.contributor.authorNafria, M.
dc.contributor.authorPetry, Jasmine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-16T00:46:56Z
dc.date.available2021-10-16T00:46:56Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10109
dc.source.beginpage1506
dc.source.endpage1511
dc.source.issue9
dc.source.journalNanotechnology
dc.source.volume16
dc.title

Electrical characterization of high-dielectric-constant/SiO2 metal-oxide-semiconductor gate stacks by a conductive atomic force microscope

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections: