Publication:
Interplay between dry etch and wet clean in patterning La2O3/HfO2-containing high-k/metal gate stacks
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
2008 since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations
Metrics
Views
2008 since deposited on 2021-10-18
Acq. date: 2025-12-15
Citations