Publication:
Interplay between dry etch and wet clean in patterning La2O3/HfO2-containing high-k/metal gate stacks
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2009 since deposited on 2021-10-18
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Acq. date: 2026-02-26
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2009 since deposited on 2021-10-18
1last month
Acq. date: 2026-02-26
Citations