Publication:
Investigation of stress in shallow trench isolation using UV micro-raman spectroscopy
Date
| dc.contributor.author | Dombrowski, Kai | |
| dc.contributor.author | Dietrich, B. | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Rooyackers, Rita | |
| dc.contributor.author | Badenes, Gonçal | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-14T16:52:15Z | |
| dc.date.available | 2021-10-14T16:52:15Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5260 | |
| dc.source.beginpage | 511 | |
| dc.source.endpage | 515 | |
| dc.source.issue | 4 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.volume | 41 | |
| dc.title | Investigation of stress in shallow trench isolation using UV micro-raman spectroscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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