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Single-wafer wet cleaning for a high particle removal efficiency on hydrophobic surface
Publication:
Single-wafer wet cleaning for a high particle removal efficiency on hydrophobic surface
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sano, Ken-Ichi
;
Izumi, A.
;
Eitoku, Atsuro
;
Snow, Jim
;
Kesters, Els
;
Mertens, Paul
Journal
Abstract
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1987
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1987
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations