Publication:

Progress in directed self-assembly hole shrink applications

Date

2013

Proceedings Paper

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Author(s)

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Rincon Delgadillo, Paulina

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;

Vandenbroeck, Nadia

;

Demuynck, Steven

;

Romo Negreira, Ainhoa

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;

Nafus, Kathleen

;

Tahara, Shigeru

;

Somervell, Mark

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