Publication:

Progress in directed self-assembly hole shrink applications

Date

2013
Proceedings Paper
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dc.contributor.authorYounkin, Todd
dc.contributor.authorGronheid, Roel
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorChan, BT
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorDemuynck, Steven
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorParnell, Doni
dc.contributor.authorNafus, Kathleen
dc.contributor.authorTahara, Shigeru
dc.contributor.authorSomervell, Mark
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-21T14:55:07Z
dc.date.available2021-10-21T14:55:07Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23427
dc.source.beginpage86820L
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXX
dc.source.conferencedate25/02/2013
dc.source.conferencelocationSan Jose, CA US
dc.title

Progress in directed self-assembly hole shrink applications

dc.typeProceedings paper
dspace.entity.typePublication
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