Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Mechanical response of electrostatic actuators under ESD stress
Publication:
Mechanical response of electrostatic actuators under ESD stress
Date
2009
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
18133.pdf
1.46 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sangameswaran, Sandeep
;
De Coster, Jeroen
;
Linten, Dimitri
;
Scholz, Mirko
;
Thijs, Steven
;
Van Hoof, Chris
;
De Wolf, Ingrid
;
Groeseneken, Guido
Journal
Abstract
Description
Metrics
Views
1857
since deposited on 2021-10-18
404
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1857
since deposited on 2021-10-18
404
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations