Publication:

Mechanical response of electrostatic actuators under ESD stress

Date

2009
Proceedings Paper
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dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLinten, Dimitri
dc.contributor.authorScholz, Mirko
dc.contributor.authorThijs, Steven
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-18T02:34:47Z
dc.date.available2021-10-18T02:34:47Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16153
dc.source.beginpage2110
dc.source.conferenceTransducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate21/06/2009
dc.source.conferencelocationDenver, CO USA
dc.source.endpage2113
dc.title

Mechanical response of electrostatic actuators under ESD stress

dc.typeProceedings paper
dspace.entity.typePublication
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