Publication:
Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina
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1953 since deposited on 2021-10-20
Acq. date: 2026-06-04
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Statistics
Views
1953 since deposited on 2021-10-20
Acq. date: 2026-06-04
Citations