Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina

dc.contributor.author	Zekry, Joseph
dc.contributor.author	Sabuncuoglu Tezcan, Deniz
dc.contributor.author	Celis, Jean-Pierre
dc.contributor.author	Puers, Bob
dc.contributor.author	Van Hoof, Chris
dc.contributor.author	Tilmans, Harrie
dc.contributor.imecauthor	Sabuncuoglu Tezcan, Deniz
dc.contributor.imecauthor	Puers, Bob
dc.contributor.imecauthor	Van Hoof, Chris
dc.contributor.imecauthor	Tilmans, Harrie
dc.contributor.orcidimec	Sabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimec	Tilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimec	Van Hoof, Chris::0000-0002-4645-3326
dc.date.accessioned	2021-10-20T19:30:51Z
dc.date.available	2021-10-20T19:30:51Z
dc.date.issued	2012
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21910
dc.source.conference	Wilhelm and Else Heraeus Physics School "Microelectronics for Society - More than Moore expands More Moore"
dc.source.conferencedate	10/06/2012
dc.source.conferencelocation	Bad Honnef Germany
dc.title	Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina
dc.type	Oral presentation
dspace.entity.type	Publication
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