Publication:
TEM characterization of extended defects induced in Si wafers by H-plasma treatment
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1946 since deposited on 2021-10-16
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Acq. date: 2025-10-25
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Views
1946 since deposited on 2021-10-16
445item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations