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Structural analysis and resistivity measurements of InAs and GaSb fins on 300 mm Si for vertical (T)FET
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Structural analysis and resistivity measurements of InAs and GaSb fins on 300 mm Si for vertical (T)FET
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mols, Yves
;
Bogdanowicz, Janusz
;
Favia, Paola
;
Lagrain, Pieter
;
Guo, Weiming
;
Bender, Hugo
;
Kunert, Bernardette
Journal
Journal of Applied Physics
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1947
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1947
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-15
Citations