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Reducing the electrodeposition time for filling microvias with copper for 3D technology
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Reducing the electrodeposition time for filling microvias with copper for 3D technology
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Date
2008
Proceedings Paper
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15368.pdf
2.66 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Luhn, Ole
;
Radisic, Alex
;
Vereecken, Philippe
;
Swinnen, Bart
;
Van Hoof, Chris
;
Ruythooren, Wouter
;
Celis, Jean-Pierre
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1832
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1832
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations