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Using machine learning algorithms on review sem images to understand stochastic behaviour of EUV based patterning for n7 and smaller nodes
Publication:
Using machine learning algorithms on review sem images to understand stochastic behaviour of EUV based patterning for n7 and smaller nodes
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Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Halder, Sandip
;
Cerbu, Dorin
;
Leray, Philippe
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1903
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Acq. date: 2025-12-15
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Metrics
Views
1903
since deposited on 2021-10-25
1
last month
1
last week
Acq. date: 2025-12-15
Citations