Publication:

New sensitive electrical measurement techniques for the study of stress induced voiding

Date

1998
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorBender, Hugo
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-01T09:48:26Z
dc.date.available2021-10-01T09:48:26Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3156
dc.source.beginpage279
dc.source.conferenceAdvanced Metallization and Interconnect Systems for ULSI Applications in 1997
dc.source.conferencedate30/09/1997
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage285
dc.title

New sensitive electrical measurement techniques for the study of stress induced voiding

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
2601.pdf
Size:
1.34 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions