Publication:
On the efficiency of stress techniques in gate-last n-type bulk FinFETs
Date
| dc.contributor.author | Eneman, Geert | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Veloso, Anabela | |
| dc.contributor.author | De Keersgieter, An | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.author | Hoffmann, Thomas | |
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.author | Thean, Aaron | |
| dc.contributor.imecauthor | Eneman, Geert | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | Veloso, Anabela | |
| dc.contributor.imecauthor | De Keersgieter, An | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.contributor.imecauthor | Horiguchi, Naoto | |
| dc.contributor.imecauthor | Thean, Aaron | |
| dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.contributor.orcidimec | De Keersgieter, An::0000-0002-5527-8582 | |
| dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
| dc.date.accessioned | 2021-10-20T10:54:09Z | |
| dc.date.available | 2021-10-20T10:54:09Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 0038-1101 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20652 | |
| dc.source.beginpage | 19 | |
| dc.source.endpage | 24 | |
| dc.source.journal | Solid-State Electronics | |
| dc.source.volume | 74 | |
| dc.title | On the efficiency of stress techniques in gate-last n-type bulk FinFETs | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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