Publication:

Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109

Date

2002
Journal article
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Author(s)

Das, Arabinda
;
Kokubo, Terukazu
;
Furukawa, Yukiko
;
Struyf, Herbert  
;
Vos, Ingrid  
;
Sijmus, Bram
;
Iacopi, Francesca
;
Van Aelst, Joke  
;
Le, Quoc Toan  
;
Carbonell, Laure
;
Brongersma, Sywert  
;
Maenhoudt, Mireille
;
Tokei, Zsolt  
;
Vervoort, Iwan
;
Sleeckx, Erik  
;
Stucchi, Michele  
;
Schaekers, Marc  
;
Boullart, Werner  
;
Rosseel, Erik  
;
Van Hove, Marleen
;
Vanhaelemeersch, Serge  
;
Shiota, A.
;
Maex, Karen  

Journal

Microelectronic Engineering

Abstract

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2097 since deposited on 2021-10-14
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