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Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109

Date

2002
Journal article
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dc.contributor.authorDas, Arabinda
dc.contributor.authorKokubo, Terukazu
dc.contributor.authorFurukawa, Yukiko
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVos, Ingrid
dc.contributor.authorSijmus, Bram
dc.contributor.authorIacopi, Francesca
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorCarbonell, Laure
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVervoort, Iwan
dc.contributor.authorSleeckx, Erik
dc.contributor.authorStucchi, Michele
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBoullart, Werner
dc.contributor.authorRosseel, Erik
dc.contributor.authorVan Hove, Marleen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.date.accessioned2021-10-14T21:19:41Z
dc.date.available2021-10-14T21:19:41Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6170
dc.source.beginpage25
dc.source.endpage33
dc.source.issue1_4
dc.source.journalMicroelectronic Engineering
dc.source.volume64
dc.title

Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109

dc.typeJournal article
dspace.entity.typePublication
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