Electrical characterization of BEOL plasma-induced damage in bulk FinFET technology

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Author(s)

Hiblot, Gaspard

;

Subirats, Alexandre

;

;

Van der Plas, Geert

Journal

IEEE Transactions on Device and Materials Reliability

Metrics

1923 since deposited on 2021-10-27

Acq. date: 2025-10-23