Publication:
Electrical characterization of BEOL plasma-induced damage in bulk FinFET technology
Date
| dc.contributor.author | Hiblot, Gaspard | |
| dc.contributor.author | Subirats, Alexandre | |
| dc.contributor.author | Liu, Yefan | |
| dc.contributor.author | Van der Plas, Geert | |
| dc.contributor.imecauthor | Hiblot, Gaspard | |
| dc.contributor.imecauthor | Liu, Yefan | |
| dc.contributor.imecauthor | Van der Plas, Geert | |
| dc.contributor.orcidimec | Hiblot, Gaspard::0000-0002-3869-965X | |
| dc.contributor.orcidimec | Van der Plas, Geert::0000-0002-4975-6672 | |
| dc.date.accessioned | 2021-10-27T10:27:50Z | |
| dc.date.available | 2021-10-27T10:27:50Z | |
| dc.date.issued | 2019 | |
| dc.identifier.issn | 1530-4388 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33158 | |
| dc.identifier.url | https://ieeexplore.ieee.org/document/8537789 | |
| dc.source.beginpage | 88 | |
| dc.source.endpage | 89 | |
| dc.source.issue | 1 | |
| dc.source.journal | IEEE Transactions on Device and Materials Reliability | |
| dc.source.volume | 19 | |
| dc.title | Electrical characterization of BEOL plasma-induced damage in bulk FinFET technology | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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