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New methods and instrumentation for functional, yield and reliability testing of MEMS on device, chip and wafer level
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New methods and instrumentation for functional, yield and reliability testing of MEMS on device, chip and wafer level
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Date
2009
Proceedings Paper
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18397.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Ingrid
;
De Coster, Jeroen
;
Cherman, Vladimir
;
Czarnecki, Piotr
;
Kalicinski, Stanislaw
;
Varela Pedreira, Olalla
;
Sangameswaran, Sandeep
;
Vanstreels, Kris
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1918
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1918
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations