Publication:

Contamination control for the 32nm node

Date

2008
Journal article
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dc.contributor.authorBearda, Twan
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.contributor.authorCatana, Gabriela
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-17T06:16:00Z
dc.date.available2021-10-17T06:16:00Z
dc.date.issued2008
dc.identifier.issn1355-8633
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13356
dc.identifier.urlhttp://www.fabtech.org/journal/
dc.source.beginpage79
dc.source.endpage85
dc.source.issue37
dc.source.journalSemiconductor Fabtech
dc.title

Contamination control for the 32nm node

dc.typeJournal article
dspace.entity.typePublication
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