Publication:

Metrology and inspection challenges for manufacturing 3D stacked IC's

Date

2013

Proceedings Paper

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Files

26637.pdf 825.79 KB

Author(s)

;

;

;

De Wolf, Ingrid

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Phommahaxay, Alain

;

Maenhoudt, Mireille

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;

Guerrieri, Stefano

Metrics

1875 since deposited on 2021-10-21

Acq. date: 2025-12-11