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The influence of addition elements on the early resistance changes observed during electromigration testing of Al metal lines
Publication:
The influence of addition elements on the early resistance changes observed during electromigration testing of Al metal lines
Date
1998
Journal article
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2514.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Ceuninck, Ward
;
D'Haeger, V.
;
Van Olmen, Jan
;
Witvrouw, Ann
;
Maex, Karen
;
De Schepper, Luc
;
De Pauw, P.
;
Pergoot, A.
Journal
Microelectronics Reliability
Abstract
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1890
since deposited on 2021-09-30
406
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1890
since deposited on 2021-09-30
406
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations