Publication:

The influence of addition elements on the early resistance changes observed during electromigration testing of Al metal lines

Date

1998
Journal article
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dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorD'Haeger, V.
dc.contributor.authorVan Olmen, Jan
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorMaex, Karen
dc.contributor.authorDe Schepper, Luc
dc.contributor.authorDe Pauw, P.
dc.contributor.authorPergoot, A.
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorVan Olmen, Jan
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-09-30T11:40:25Z
dc.date.available2021-09-30T11:40:25Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2485
dc.source.beginpage87
dc.source.endpage98
dc.source.issue1
dc.source.journalMicroelectronics Reliability
dc.source.volume38
dc.title

The influence of addition elements on the early resistance changes observed during electromigration testing of Al metal lines

dc.typeJournal article
dspace.entity.typePublication
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