Publication:

Etch process modules development and integration in 3D-SOC applications

Date

2018
Journal article
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Author(s)

Tutunjyan, Nina  
;
Sardo, Stefano  
;
De Vos, Joeri  
;
Van Huylenbroeck, Stefaan  
;
Jourdain, Anne  
;
Peng, Lan  
;
Inoue, Fumihiro  
;
Rassoul, Nouredine  
;
Beyer, Gerald  
;
Beyne, Eric  
;
Miller, Andy  
;
Piumi, Daniele  

Journal

Microelectronic Engineering

Abstract

Description

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1955 since deposited on 2021-10-26
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