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Interface properties improvement of Ge/Al2O3 and Ge/GeO2/Al2O3 gate stacks using molecular beam deposition
Publication:
Interface properties improvement of Ge/Al2O3 and Ge/GeO2/Al2O3 gate stacks using molecular beam deposition
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bellenger, Florence
;
Merckling, Clement
;
Penaud, Julien
;
Houssa, Michel
;
Caymax, Matty
;
Meuris, Marc
;
De Meyer, Kristin
;
Heyns, Marc
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1852
since deposited on 2021-10-17
Acq. date: 2026-09-19
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Views
1852
since deposited on 2021-10-17
Acq. date: 2026-09-19
Citations