Publication:
Successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility hetero-channel pMOS applications
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1920 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-11
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Views
1920 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-11
Citations