Publication:
Successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility hetero-channel pMOS applications
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1917 since deposited on 2021-10-15
Acq. date: 2025-10-23
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Views
1917 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations