Publication:

Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation

Date

2021
Journal article
https://doi.org/10.3390/coatings11111352
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Published version 10.21 MB

Author(s)

Astoreca, Laura  
;
Schaubroeck, David  
;
Tabaei, Parinaz Saadat Esbah
;
Ghobeira, Rouba
;
Morent, Rino
;
De Geyter, Nathalie
;
Op de Beeck, Maaike  
;
De Smet, Herbert  

Journal

COATINGS

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157 since deposited on 2021-12-09
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1670 since deposited on 2021-12-09
3last month
Acq. date: 2026-02-24

Citations