Publication:

Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation

Date

2021
Journal article
https://doi.org/10.3390/coatings11111352
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dc.contributor.authorAstoreca, Laura
dc.contributor.authorSchaubroeck, David
dc.contributor.authorTabaei, Parinaz Saadat Esbah
dc.contributor.authorGhobeira, Rouba
dc.contributor.authorMorent, Rino
dc.contributor.authorDe Geyter, Nathalie
dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorDe Smet, Herbert
dc.contributor.imecauthorAstoreca, Laura
dc.contributor.imecauthorSchaubroeck, David
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.orcidimecSchaubroeck, David::0000-0001-9576-3091
dc.contributor.orcidimecDe Smet, Herbert::0000-0001-9640-8454
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.date.accessioned2022-06-16T09:30:05Z
dc.date.available2021-12-09T02:03:50Z
dc.date.available2022-06-16T09:30:05Z
dc.date.issued2021
dc.identifier.doi10.3390/coatings11111352
dc.identifier.issn2079-6412
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38582
dc.publisherMDPI
dc.source.beginpage1352
dc.source.issue11
dc.source.journalCOATINGS
dc.source.numberofpages20
dc.source.volume11
dc.subject.keywordsATOMIC LAYER DEPOSITION
dc.subject.keywordsBPDA-PPD POLYIMIDE
dc.subject.keywordsALUMINUM-OXIDE
dc.subject.keywordsSURFACE MODIFICATION
dc.subject.keywordsBARRIER PROPERTIES
dc.subject.keywordsAL2O3
dc.subject.keywordsPOLYMER
dc.subject.keywordsGROWTH
dc.subject.keywordsFILMS
dc.subject.keywordsTIO2
dc.title

Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation

dc.typeJournal article
dspace.entity.typePublication
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