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Substrate orientation, doping and plasma frequency dependencies of structural defect formation in hydrogen plasma treated silicon
Publication:
Substrate orientation, doping and plasma frequency dependencies of structural defect formation in hydrogen plasma treated silicon
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ulyashin, A.
;
Job, R.
;
Fahrner, W.
;
Richard, Olivier
;
Bender, Hugo
;
Claeys, Cor
;
Simoen, Eddy
;
Grambole, D.
Journal
Journal of Physics - Condensed Matter
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2022
since deposited on 2021-10-14
3
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Acq. date: 2026-01-10
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Views
2022
since deposited on 2021-10-14
3
last month
Acq. date: 2026-01-10
Citations