Publication:
Substrate orientation, doping and plasma frequency dependencies of structural defect formation in hydrogen plasma treated silicon
Date
| dc.contributor.author | Ulyashin, A. | |
| dc.contributor.author | Job, R. | |
| dc.contributor.author | Fahrner, W. | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Grambole, D. | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T23:25:56Z | |
| dc.date.available | 2021-10-14T23:25:56Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6898 | |
| dc.source.beginpage | 13037 | |
| dc.source.endpage | 13045 | |
| dc.source.issue | 48 | |
| dc.source.journal | Journal of Physics - Condensed Matter | |
| dc.source.volume | 14 | |
| dc.title | Substrate orientation, doping and plasma frequency dependencies of structural defect formation in hydrogen plasma treated silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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