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Conference contributions
Evaluation procedure for fast and realistic assessment of plasma charging damage in thin oxides
Publication:
Evaluation procedure for fast and realistic assessment of plasma charging damage in thin oxides
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Date
2002
Proceedings Paper
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6127.pdf
321.87 KB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van den Bosch, Geert
;
De Jaeger, Brice
;
Groeseneken, Guido
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Abstract
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1898
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations
Metrics
Views
1898
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations