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Evaluation procedure for fast and realistic assessment of plasma charging damage in thin oxides

Date

2002
Proceedings Paper
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dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.date.accessioned2021-10-14T23:30:43Z
dc.date.available2021-10-14T23:30:43Z
dc.date.embargo9999-12-31
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6920
dc.source.beginpage37
dc.source.conferenceP2ID'02-7th International Symposium on Plasma- and Process-Induced Damage
dc.source.conferencedate5/06/2002
dc.source.conferencelocationMaui, HA USA
dc.source.endpage40
dc.title

Evaluation procedure for fast and realistic assessment of plasma charging damage in thin oxides

dc.typeProceedings paper
dspace.entity.typePublication
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