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Polarized neutron reflectometry on lithographically patterned thin film structures

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dc.contributor.authorTemst, K.
dc.contributor.authorVan Bael, M.J.
dc.contributor.authorSwerts, J.
dc.contributor.authorLoosvelt, H.
dc.contributor.authorPopova, E.
dc.contributor.authorBuntinx, D.
dc.contributor.authorBekaert, Joost
dc.contributor.authorVan Haesendonck, C.
dc.contributor.authorBruynseraede, Y.
dc.contributor.authorJonckheere, Rik
dc.contributor.authorFritzsche, H.
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.accessioned2021-10-15T16:36:29Z
dc.date.available2021-10-15T16:36:29Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9670
dc.source.beginpage87
dc.source.endpage105
dc.source.issue1_2
dc.source.journalSuperlattices and microstructures
dc.source.volume34
dc.title

Polarized neutron reflectometry on lithographically patterned thin film structures

dc.typeJournal article
dspace.entity.typePublication
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