Publication:
Ru/Ta bilayer approach to EUV mask absorbers: Experimental patterning and simulated imaging perspective
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1300 since deposited on 2023-10-07
49last month
7last week
Acq. date: 2026-08-22
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922 since deposited on 2023-10-07
1last month
Acq. date: 2026-08-22
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