Publication:
Ru/Ta bilayer approach to EUV mask absorbers: Experimental patterning and simulated imaging perspective
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Acq. date: 2026-07-18
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1236 since deposited on 2023-10-07
37last month
15last week
Acq. date: 2026-07-18
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921 since deposited on 2023-10-07
Acq. date: 2026-07-18
Citations