Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Combined electrical and spectroscopic investigation of thermal donor formation in plasma-hydrigenated n-type czochralski silicon
Publication:
Combined electrical and spectroscopic investigation of thermal donor formation in plasma-hydrigenated n-type czochralski silicon
Date
2004
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
8897.pdf
155.1 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rafi, Joan Marc
;
Simoen, Eddy
;
Claeys, Cor
;
Ulyashin, Aliaksandr
;
Huang, Y.L.
;
Job, R.
;
Lauwaert, J.
;
Clauws, P.
Journal
Abstract
Description
Metrics
Views
1999
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1999
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations