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Combined electrical and spectroscopic investigation of thermal donor formation in plasma-hydrigenated n-type czochralski silicon
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Combined electrical and spectroscopic investigation of thermal donor formation in plasma-hydrigenated n-type czochralski silicon
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rafi, Joan Marc
;
Simoen, Eddy
;
Claeys, Cor
;
Ulyashin, Aliaksandr
;
Huang, Y.L.
;
Job, R.
;
Lauwaert, J.
;
Clauws, P.
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2004
since deposited on 2021-10-15
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last week
Acq. date: 2026-01-09
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Views
2004
since deposited on 2021-10-15
1
last month
1
last week
Acq. date: 2026-01-09
Citations